filename:TLM__MD_M022_S079_TARGET_EXPOSE_SCAN___COUNT_2200001.DAT
scan_file:SCAN_MD_M022_S079_2015-10-26T155551Z_TGT03
sw_ver:664
start_time:"2015-10-26 15:55:51.014648"
end_time:"2015-10-26 20:02:22.019442"
duration:"4:06:31.004794"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.545204852368963
set_pt:3.2724498359655145
fadj:5.5634393835355151
ctrl_image:False
mag_phase:False
work_pt:5.890634430419986
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-61.977653654578496
y_orig_um:1.9555557120000002