filename:TLM__MD_M022_S079_TARGET_EXPOSE_SCAN___COUNT_2200001.DAT
scan_file:SCAN_MD_M022_S079_2015-10-27T063500Z_TGT10
sw_ver:664
start_time:"2015-10-27 06:35:00.031743"
end_time:"2015-10-27 12:42:00.038879"
duration:"6:07:00.007136"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:45000
y_orig:43000
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:8
y_step_nm:30.510719999999999
ylen_um:7.8107443199999995
z_step:4.0
z_ret:558
z_ret_nm:91.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:4.9997711146715496
fadj:7.4998092622262913
ctrl_image:False
mag_phase:False
work_pt:7.999725339934237
set_pt_per:50.000762951094835
work_pt_per:-79.99847409781033
xy_settle:100
z_settle:100
x_orig_um:-78.506313386739592
y_orig_um:5.7207599999999994