filename:TLM__MD_M022_S080_TARGET_EXPOSE_SCAN___COUNT_2200002.DAT
scan_file:SCAN_MD_M022_S080_2015-10-28T071912Z_TGT03
sw_ver:664
start_time:"2015-10-28 07:19:12.060602"
end_time:"2015-10-28 13:36:58.067948"
duration:"6:17:46.007346"
channel:ZS
tip_num:10
lin_pos:-1.321736476691844
tip_offset:15.461165789273076
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:2.4997329671168078
fadj:-6.000152590218967
ctrl_image:False
mag_phase:False
work_pt:4.499969481374112
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:13.508479709273077
y_orig_um:1.9555557120000002