filename:TLM__MD_M022_S080_TARGET_EXPOSE_SCAN___COUNT_2200002.DAT
scan_file:SCAN_MD_M022_S080_2015-10-29T043855Z_TGT22
sw_ver:664
start_time:"2015-10-29 04:38:55.090756"
end_time:"2015-10-29 12:04:21.099485"
duration:"7:25:26.008729"
channel:ZS
tip_num:14
lin_pos:-4.8096437018387119
tip_offset:55.373521782254855
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:44366
y_orig:25837
xsteps:384
x_step:7
x_step_nm:26.69688
xlen_um:10.251601920000001
ysteps:384
y_step:19
y_step_nm:26.388891000000001
ylen_um:10.133334144000001
z_step:4.0
z_ret:326
z_ret_nm:53.464000000000006
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1891355764095524
set_pt:1.4377050431067369
fadj:-7.1244373235675589
ctrl_image:False
mag_phase:False
work_pt:3.235138434178593
set_pt_per:20.0
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:54.86246722225485
y_orig_um:9.6263896590000009