filename:TLM__MD_M022_S080_TARGET_EXPOSE_SCAN___COUNT_2200002.DAT
scan_file:SCAN_MD_M022_S080_2015-10-30T090311Z_TGT22
sw_ver:664
start_time:"2015-10-30 09:03:11.124153"
end_time:"2015-10-30 16:28:39.132883"
duration:"7:25:28.008730"
channel:ZS
tip_num:14
lin_pos:-4.8096437018387119
tip_offset:55.373521782254855
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:44366
y_orig:32404
xsteps:384
x_step:7
x_step_nm:26.69688
xlen_um:10.251601920000001
ysteps:384
y_step:19
y_step_nm:26.388891000000001
ylen_um:10.133334144000001
z_step:4.0
z_ret:326
z_ret_nm:53.464000000000006
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2288090333409629
set_pt:1.445639734493019
fadj:-7.1085679407949947
ctrl_image:False
mag_phase:False
work_pt:3.2529916411422652
set_pt_per:20.0
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:54.86246722225485
y_orig_um:0.505555596