filename:TLM__MD_M022_S080_TARGET_EXPOSE_SCAN___COUNT_2200002.DAT
scan_file:SCAN_MD_M022_S080_2015-10-31T072848Z_TGT21
sw_ver:664
start_time:"2015-10-31 07:28:48.150522"
end_time:"2015-11-01 02:34:22.172971"
duration:"19:05:34.022449"
channel:ZS
tip_num:14
lin_pos:-4.8831921873807893
tip_offset:-73.336327916380554
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:42068
y_orig:25958
xsteps:512
x_step:5
x_step_nm:19.069199999999999
xlen_um:9.763430399999999
ysteps:512
y_step:14
y_step_nm:19.444445999999999
ylen_um:9.9555563520000003
z_step:4.0
z_ret:237
z_ret_nm:38.868000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1729610131990542
set_pt:1.4343480582894637
fadj:-7.1308461127641722
ctrl_image:False
mag_phase:False
work_pt:3.2278598190318655
set_pt_per:20.0
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-82.61158679638055
y_orig_um:9.458334090000001