filename:TLM__MD_M022_S080_TARGET_EXPOSE_SCAN___COUNT_2200002.DAT scan_file:SCAN_MD_M022_S080_2015-11-03T010544Z_TGT21 sw_ver:664 start_time:"2015-11-03 01:05:44.227671" end_time:"2015-11-03 12:37:52.241234" duration:"11:32:08.013563" channel:ZS tip_num:14 lin_pos:-4.8831921873807893 tip_offset:-73.336327916380554 wheel_pos:336 target:21 target_type:SOLGEL x_orig:44372 y_orig:32410 xsteps:512 x_step:5 x_step_nm:19.069199999999999 xlen_um:9.763430399999999 ysteps:512 y_step:14 y_step_nm:19.444445999999999 ylen_um:9.9555563520000003 z_step:4.0 z_ret:237 z_ret_nm:38.868000000000002 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:2 ac_gain:2 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.2086671244373237 set_pt:1.4416723887998779 fadj:-7.1168078126192107 ctrl_image:False mag_phase:False work_pt:3.24392770529917 set_pt_per:20.0 work_pt_per:-45.00038147554742 xy_settle:50 z_settle:50 x_orig_um:-73.824499436380549 y_orig_um:0.49722226200000003