filename:TLM__MD_M022_S081_TARGET_EXPOSE_SCAN___COUNT_2200003.DAT
scan_file:SCAN_MD_M022_S081_2015-11-06T030938Z_TGT21
sw_ver:664
start_time:"2015-11-06 03:09:38.314754"
end_time:"2015-11-06 08:00:46.320459"
duration:"4:51:08.005705"
channel:ZS
tip_num:15
lin_pos:-5.786221103227283
tip_offset:-145.13693064774509
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:39125
y_orig:26489
xsteps:224
x_step:1
x_step_nm:3.8138399999999999
xlen_um:0.85430015999999998
ysteps:224
y_step:1
y_step_nm:1.388889
ylen_um:0.31111113600000001
z_step:4.0
z_ret:5246
z_ret_nm:860.34400000000005
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1012436102845804
set_pt:1.7752346074616616
fadj:-7.1595330739299614
ctrl_image:False
mag_phase:False
work_pt:3.195586714135997
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-165.63632064774509
y_orig_um:8.7208340310000008