filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-11T074741Z_TGT21
sw_ver:664
start_time:"2015-11-11 07:47:41.461295"
end_time:"2015-11-11 16:35:54.471646"
duration:"8:48:13.010351"
channel:ZS
tip_num:15
lin_pos:-5.6360723277637907
tip_offset:117.62342641336633
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:7628
z_ret_nm:1250.992
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0643167772945752
set_pt:1.7660791943236438
fadj:-7.1744869153887239
ctrl_image:False
mag_phase:False
work_pt:3.1789694984236565
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:120
x_orig_um:77.593361773366325
y_orig_um:40.000003200000002