filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-12T061712Z_TGT03
sw_ver:664
start_time:"2015-11-12 06:17:12.487740"
end_time:"2015-11-12 13:36:16.496344"
duration:"7:19:04.008604"
channel:ZS
tip_num:15
lin_pos:-5.7282368200198368
tip_offset:-43.664435034714245
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:1
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.8738841840238036
set_pt:1.7184710460059509
fadj:-7.2504768444342718
ctrl_image:False
mag_phase:False
work_pt:3.093274104998032
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-45.617121114714251
y_orig_um:1.9555557120000002