filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-14T074929Z_TGT10
sw_ver:664
start_time:"2015-11-14 07:49:29.545985"
end_time:"2015-11-14 11:29:36.550298"
duration:"3:40:07.004313"
channel:ZS
tip_num:9
lin_pos:-0.3039597161821927
tip_offset:239.82049668116278
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34000
y_orig:0
xsteps:64
x_step:205
x_step_nm:781.83719999999994
xlen_um:50.037580799999994
ysteps:64
y_step:562
y_step_nm:780.55561799999998
ylen_um:49.955559551999997
z_step:4.0
z_ret:14302
z_ret_nm:2345.5280000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.0339513237201494
set_pt:7.2269779507133594
fadj:7.6786449988555736
ctrl_image:False
mag_phase:False
work_pt:8.130487266717603
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:199.77517668116278
y_orig_um:45.511114752000005