filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-14T130326Z_TGT10
sw_ver:664
start_time:"2015-11-14 13:03:26.552137"
end_time:"2015-11-15 04:09:14.569887"
duration:"15:05:48.017750"
channel:ZS
tip_num:9
lin_pos:-0.3039597161821927
tip_offset:239.82049668116278
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:45942
y_orig:0
xsteps:256
x_step:2
x_step_nm:7.6276799999999998
xlen_um:1.9526860799999999
ysteps:256
y_step:155
y_step_nm:215.277795
ylen_um:55.111115519999998
z_step:4.0
z_ret:14302
z_ret_nm:2345.5280000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.3376058594644089
set_pt:7.4699015793087664
fadj:7.936827649347677
ctrl_image:False
mag_phase:False
work_pt:8.403774032151832
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:245.32005396116278
y_orig_um:45.511114752000005