filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-15T043636Z_TGT03
sw_ver:664
start_time:"2015-11-15 04:36:36.570424"
end_time:"2015-11-15 04:37:16.570437"
duration:"0:00:40.000013"
channel:ZS
tip_num:14
lin_pos:-0.43945983062485694
tip_offset:7703.1952964065003
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:43988
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:4
y_step_nm:15.25536
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:0.20996414129854277
set_pt:0.10498207064927138
fadj:0.17822537575341421
ctrl_image:False
mag_phase:False
work_pt:0.18896612524497372
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:7701.2426103265007
y_orig_um:1.9526860799999999