filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-15T063544Z_TGT03
sw_ver:664
start_time:"2015-11-15 06:35:44.572758"
end_time:"2015-11-16 11:36:30.606870"
duration:"1 day, 5:00:46.034112"
channel:ZS
tip_num:14
lin_pos:-0.43945983062485694
tip_offset:7703.1952964065003
wheel_pos:48
target:3
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2172121766994737
set_pt:1.8042267490653849
fadj:-7.1131456473640036
ctrl_image:False
mag_phase:False
work_pt:3.2477730114144223
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:7663.1652317665003
y_orig_um:40.000003200000002