filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-16T171541Z_TGT02
sw_ver:664
start_time:"2015-11-16 17:15:41.613517"
end_time:"2015-11-17 02:08:31.623959"
duration:"8:52:50.010442"
channel:ZS
tip_num:14
lin_pos:-4.8468757152666511
tip_offset:-9.7825017166386274
wheel_pos:32
target:2
target_type:CAL
x_orig:39220
y_orig:18368
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:150
y_step_nm:208.33335
ylen_um:40.000003200000002
z_step:4.0
z_ret:3837
z_ret_nm:629.26800000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1302357518883044
set_pt:1.7825589379720761
fadj:-7.1479362172884722
ctrl_image:False
mag_phase:False
work_pt:3.2086332884556037
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-29.919576916638626
y_orig_um:20.000001600000001