filename:TLM__MD_M022_S082_TARGET_EXPOSE_SCAN___COUNT_2200004.DAT
scan_file:SCAN_MD_M022_S082_2015-11-17T085032Z_TGT02
sw_ver:664
start_time:"2015-11-17 08:50:32.631836"
end_time:"2015-11-17 11:42:16.635202"
duration:"2:51:44.003366"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:32
target:2
target_type:CAL
x_orig:43220
y_orig:29184
xsteps:128
x_step:20
x_step_nm:76.276799999999994
xlen_um:9.763430399999999
ysteps:128
y_step:56
y_step_nm:77.777783999999997
ylen_um:9.9555563520000003
z_step:4.0
z_ret:1423
z_ret_nm:233.37200000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1372549019607847
set_pt:1.7840848401617457
fadj:-7.1451895933470668
ctrl_image:False
mag_phase:False
work_pt:3.2117919327645614
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-15.198282683022999
y_orig_um:4.9777781760000002