filename:TLM__MD_M023_S083_TARGET_EXPOSE_SCAN___COUNT_2300001.DAT
scan_file:SCAN_MD_M023_S083_2015-11-18T082658Z_TGT01
sw_ver:664
start_time:"2015-11-18 08:26:58.659593"
end_time:"2015-11-18 20:40:23.673965"
duration:"12:13:25.014372"
channel:ZS
tip_num:14
lin_pos:-4.7009994659342338
tip_offset:245.50093461509158
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2132448310063326
set_pt:1.8033112077515832
fadj:-7.1149767299916071
ctrl_image:False
mag_phase:False
work_pt:3.2459876907180556
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:205.47086997509157
y_orig_um:40.000003200000002