filename:TLM__MD_M023_S083_TARGET_EXPOSE_SCAN___COUNT_2300001.DAT scan_file:SCAN_MD_M023_S083_2015-11-19T011707Z_TGT01 sw_ver:664 start_time:"2015-11-19 01:17:07.679388" end_time:"2015-11-19 18:21:47.699468" duration:"17:04:40.020080" channel:ZS tip_num:14 lin_pos:-4.7013046463721677 tip_offset:244.96686884870721 wheel_pos:16 target:1 target_type:CAL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:4.0 z_ret:10679 z_ret_nm:1751.356 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:CON exc_lvl:2 ac_gain:2 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.1818112458991381 set_pt:3.5907530327306021 fadj:6.1045242999923701 ctrl_image:True mag_phase:False work_pt:6.463575327601696 set_pt_per:50.000762951094835 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:204.9368042087072 y_orig_um:40.000003200000002