filename:TLM__MD_M023_S083_TARGET_EXPOSE_SCAN___COUNT_2300001.DAT
scan_file:SCAN_MD_M023_S083_2015-11-19T202334Z_TGT01
sw_ver:664
start_time:"2015-11-19 20:23:34.701854"
end_time:"2015-11-20 08:00:44.715516"
duration:"11:37:10.013662"
channel:ZS
tip_num:4
lin_pos:4.1660181582360574
tip_offset:245.03177691310003
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.0939955748836496
set_pt:6.4750133516441597
fadj:6.8796826123445491
ctrl_image:False
mag_phase:False
work_pt:7.284534264167431
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:205.00171227310005
y_orig_um:40.000003200000002