filename:TLM__MD_M023_S083_TARGET_EXPOSE_SCAN___COUNT_2300001.DAT
scan_file:SCAN_MD_M023_S083_2015-11-23T052206Z_TGT10
sw_ver:664
start_time:"2015-11-23 05:22:06.797062"
end_time:"2015-11-24 00:08:53.819143"
duration:"18:46:47.022081"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:40000
y_orig:39000
xsteps:288
x_step:36
x_step_nm:137.29823999999999
xlen_um:39.541893119999997
ysteps:288
y_step:100
y_step_nm:138.88890000000001
ylen_um:40.000003200000002
z_step:4.0
z_ret:2541
z_ret_nm:416.72399999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.7423514152742809
set_pt:1.6855115587090868
fadj:-7.3032730601968412
ctrl_image:False
mag_phase:False
work_pt:3.034083857295397
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-2.2351799771112937
y_orig_um:-192.73556097670206