filename:TLM__MD_M023_S084_TARGET_EXPOSE_SCAN___COUNT_2300002.DAT
scan_file:SCAN_MD_M023_S084_2015-11-26T213426Z_TGT03
sw_ver:664
start_time:"2015-11-26 21:34:26.895483"
end_time:"2015-11-27 05:02:46.904131"
duration:"7:28:20.008648"
channel:ZS
tip_num:16
lin_pos:-6.6102082856488895
tip_offset:-0.36449988555609103
wheel_pos:48
target:3
target_type:CAL
x_orig:46036
y_orig:36992
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.61219195849546
set_pt:2.153047989623865
fadj:-6.5552758068207826
ctrl_image:False
mag_phase:False
work_pt:3.8755192347293757
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:5.4935583544439091
y_orig_um:-5.8666671360000002