filename:TLM__MD_M023_S084_TARGET_EXPOSE_SCAN___COUNT_2300002.DAT
scan_file:SCAN_MD_M023_S084_2015-11-27T160009Z_TGT03
sw_ver:664
start_time:"2015-11-27 16:00:09.916811"
end_time:"2015-11-27 19:55:59.921360"
duration:"3:55:50.004549"
channel:ZS
tip_num:9
lin_pos:-0.44098573281452658
tip_offset:0.024967574578496628
wheel_pos:48
target:3
target_type:CAL
x_orig:46036
y_orig:36992
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2239261463340201
set_pt:5.7788967727168687
fadj:6.1402304112306405
ctrl_image:False
mag_phase:False
work_pt:6.501478416676995
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:5.883025814578497
y_orig_um:-5.8666671360000002