filename:TLM__MD_M023_S084_TARGET_EXPOSE_SCAN___COUNT_2300002.DAT
scan_file:SCAN_MD_M023_S084_2015-11-29T120100Z_TGT10
sw_ver:664
start_time:"2015-11-29 12:01:00.967752"
end_time:"2015-11-29 23:30:02.981043"
duration:"11:29:02.013291"
channel:ZS
tip_num:9
lin_pos:-0.3039597161821927
tip_offset:239.82049668116278
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:37446
y_orig:0
xsteps:288
x_step:20
x_step_nm:76.276799999999994
xlen_um:21.967718399999999
ysteps:352
y_step:55
y_step_nm:76.388895000000005
ylen_um:26.888891040000001
z_step:4.0
z_ret:1304
z_ret_nm:213.85600000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9996185244525826
set_pt:5.5994506752117186
fadj:5.949492637521935
ctrl_image:False
mag_phase:False
work_pt:6.299603268341158
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:212.91766932116278
y_orig_um:45.511114752000005