filename:TLM__MD_M023_S084_TARGET_EXPOSE_SCAN___COUNT_2300002.DAT
scan_file:SCAN_MD_M023_S084_2015-11-30T035245Z_TGT24
sw_ver:664
start_time:"2015-11-30 03:52:45.986110"
end_time:"2015-11-30 21:28:11.006469"
duration:"17:35:25.020359"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:4372
z_ret_nm:717.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1598382543678953
set_pt:1.7898832684824904
fadj:-7.1363393606469829
ctrl_image:False
mag_phase:False
work_pt:3.221954527497728
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-50.468675003022994
y_orig_um:39.977780976000005