filename:TLM__MD_M023_S084_TARGET_EXPOSE_SCAN___COUNT_2300002.DAT
scan_file:SCAN_MD_M023_S084_2015-12-01T040127Z_TGT01
sw_ver:664
start_time:"2015-12-01 04:01:27.014054"
end_time:"2015-12-01 16:32:28.028541"
duration:"12:31:01.014487"
channel:ZS
tip_num:16
lin_pos:-6.4386968795300223
tip_offset:299.78046082246146
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.9082169832913713
set_pt:2.2269016556038759
fadj:-6.4368657969024188
ctrl_image:False
mag_phase:False
work_pt:4.008731625150619
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:259.75039618246149
y_orig_um:40.000003200000002