filename:TLM__MD_M023_S085_TARGET_EXPOSE_SCAN___COUNT_2300003.DAT
scan_file:SCAN_MD_M023_S085_2015-12-02T100741Z_TGT01
sw_ver:664
start_time:"2015-12-02 10:07:41.048896"
end_time:"2015-12-02 22:11:41.062861"
duration:"12:04:00.013965"
channel:ZS
tip_num:1
lin_pos:6.7869077592126343
tip_offset:244.58857862210954
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.366598001068132
set_pt:2.341649500267033
fadj:-6.2534523537041276
ctrl_image:False
mag_phase:False
work_pt:4.215004831761658
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:204.55851398210956
y_orig_um:40.000003200000002