filename:TLM__MD_M023_S085_TARGET_EXPOSE_SCAN___COUNT_2300003.DAT
scan_file:SCAN_MD_M023_S085_2015-12-03T030655Z_TGT01
sw_ver:664
start_time:"2015-12-03 03:06:55.068556"
end_time:"2015-12-03 15:08:08.082468"
duration:"12:01:13.013912"
channel:ZS
tip_num:2
lin_pos:5.9147020675974673
tip_offset:244.97861829556757
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:8.8978408484016178
set_pt:2.2244602121004045
fadj:-6.4411383230334938
ctrl_image:False
mag_phase:False
work_pt:4.004062324867814
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:204.94855365556759
y_orig_um:40.000003200000002