filename:TLM__MD_M023_S085_TARGET_EXPOSE_SCAN___COUNT_2300003.DAT
scan_file:SCAN_MD_M023_S085_2015-12-07T132743Z_TGT24
sw_ver:664
start_time:"2015-12-07 13:27:43.191638"
end_time:"2015-12-07 22:47:56.202444"
duration:"9:20:13.010806"
channel:ZS
tip_num:14
lin_pos:-4.7739375906004424
tip_offset:117.85921644922648
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:4372
z_ret_nm:717.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1555657282368204
set_pt:1.7886625467307546
fadj:-7.1378652628366526
ctrl_image:False
mag_phase:False
work_pt:3.220031874440102
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:77.707108929226479
y_orig_um:39.977780976000005