filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-09T133519Z_TGT01
sw_ver:664
start_time:"2015-12-09 13:35:19.247338"
end_time:"2015-12-10 00:44:50.260252"
duration:"11:09:31.012914"
channel:ZS
tip_num:5
lin_pos:3.270618753337911
tip_offset:244.83281834134425
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:9535
z_ret_nm:1563.74
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.2646677347982003
set_pt:2.3160143434805831
fadj:-6.2943465323872738
ctrl_image:False
mag_phase:False
work_pt:4.169135823101148
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:204.80275370134427
y_orig_um:40.000003200000002