filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-10T045029Z_TGT01
sw_ver:664
start_time:"2015-12-10 04:50:29.264991"
end_time:"2015-12-10 20:06:23.282658"
duration:"15:15:54.017667"
channel:ZS
tip_num:8
lin_pos:0.61554894331273369
tip_offset:245.4606507972839
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:9535
z_ret_nm:1563.74
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.7502861066605631
set_pt:3.3749904631113146
fadj:5.7376974135957886
ctrl_image:True
mag_phase:False
work_pt:6.075205994612752
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:205.43058615728393
y_orig_um:40.000003200000002