filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-11T094228Z_TGT24
sw_ver:664
start_time:"2015-12-11 09:42:28.298399"
end_time:"2015-12-11 19:19:08.309523"
duration:"9:36:40.011124"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:39236
y_orig:18320
xsteps:224
x_step:47
x_step_nm:179.25047999999998
xlen_um:40.152107520000001
ysteps:224
y_step:129
y_step_nm:179.16668100000001
ylen_um:40.133336544000002
z_step:4.0
z_ret:2186
z_ret_nm:358.50400000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1735713740749221
set_pt:1.7932402532997636
fadj:-7.1308461127641722
ctrl_image:False
mag_phase:False
work_pt:3.228134483754384
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-30.392621243022997
y_orig_um:20.066668272000001