filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-12T074459Z_TGT10
sw_ver:664
start_time:"2015-12-12 07:44:59.323910"
end_time:"2015-12-12 13:18:21.330340"
duration:"5:33:22.006430"
channel:ZS
tip_num:9
lin_pos:-0.3039597161821927
tip_offset:239.82049668116278
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34000
y_orig:0
xsteps:64
x_step:205
x_step_nm:781.83719999999994
xlen_um:50.037580799999994
ysteps:64
y_step:562
y_step_nm:780.55561799999998
ylen_um:49.955559551999997
z_step:4.0
z_ret:14302
z_ret_nm:2345.5280000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.647516594186313
set_pt:3.8236057068741895
fadj:6.5000381475547417
ctrl_image:True
mag_phase:False
work_pt:6.8827065879561
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:199.77517668116278
y_orig_um:45.511114752000005