filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT scan_file:SCAN_MD_M023_S086_2015-12-12T144849Z_TGT10 sw_ver:664 start_time:"2015-12-12 14:48:49.332085" end_time:"2015-12-13 07:55:07.351882" duration:"17:06:18.019797" channel:ZS tip_num:9 lin_pos:-0.30365453574425877 tip_offset:240.35456244754715 wheel_pos:160 target:10 target_type:SOLGEL x_orig:42996 y_orig:5792 xsteps:256 x_step:20 x_step_nm:76.276799999999994 xlen_um:19.526860799999998 ysteps:352 y_step:55 y_step_nm:76.388895000000005 ylen_um:26.888891040000001 z_step:4.0 z_ret:2608 z_ret_nm:427.71200000000005 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:4 ac_gain:6 x_closed:False y_closed:True aborted:False dummy:False res_amp:7.9267566948958574 set_pt:6.3413443198290986 fadj:6.7374685282673381 ctrl_image:False mag_phase:False work_pt:7.134020548129283 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:234.61854708754714 y_orig_um:37.466669664000001