filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-13T120938Z_TGT10
sw_ver:664
start_time:"2015-12-13 12:09:38.356791"
end_time:"2015-12-14 08:59:38.380903"
duration:"20:50:00.024112"
channel:ZS
tip_num:9
lin_pos:-0.30365453574425877
tip_offset:240.35456244754715
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:36016
y_orig:17246
xsteps:384
x_step:20
x_step_nm:76.276799999999994
xlen_um:29.290291199999999
ysteps:288
y_step:55
y_step_nm:76.388895000000005
ylen_um:22.000001760000004
z_step:4.0
z_ret:2608
z_ret_nm:427.71200000000005
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.4699015793087664
set_pt:5.9757381551842528
fadj:6.3492790112153807
ctrl_image:False
mag_phase:False
work_pt:6.722854429682007
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:207.99794388754714
y_orig_um:21.558335058000001