filename:TLM__MD_M023_S086_TARGET_EXPOSE_SCAN___COUNT_2300004.DAT
scan_file:SCAN_MD_M023_S086_2015-12-14T155236Z_TGT10
sw_ver:664
start_time:"2015-12-14 15:52:36.388869"
end_time:"2015-12-15 11:01:38.411033"
duration:"19:09:02.022164"
channel:ZS
tip_num:9
lin_pos:-0.30365453574425877
tip_offset:240.35456244754715
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:37446
y_orig:0
xsteps:288
x_step:20
x_step_nm:76.276799999999994
xlen_um:21.967718399999999
ysteps:352
y_step:55
y_step_nm:76.388895000000005
ylen_um:26.888891040000001
z_step:4.0
z_ret:2608
z_ret_nm:427.71200000000005
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:6
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.5822079804684517
set_pt:6.0657663843747613
fadj:6.444495307850767
ctrl_image:False
mag_phase:False
work_pt:6.823929333882807
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:213.45173508754715
y_orig_um:45.511114752000005