filename:TLM__MD_M024_S087_TARGET_EXPOSE_SCAN___COUNT_2400001.DAT
scan_file:SCAN_MD_M024_S087_2015-12-17T174219Z_TGT01
sw_ver:664
start_time:"2015-12-17 17:42:19.474316"
end_time:"2015-12-18 05:14:45.487672"
duration:"11:32:26.013356"
channel:ZS
tip_num:6
lin_pos:2.3916990920881971
tip_offset:245.22341115434517
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.3163195239185166
set_pt:5.0528725108720529
fadj:5.3687342641336686
ctrl_image:False
mag_phase:False
work_pt:5.684639381097704
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:205.19334651434519
y_orig_um:40.000003200000002