filename:TLM__MD_M024_S087_TARGET_EXPOSE_SCAN___COUNT_2400001.DAT
scan_file:SCAN_MD_M024_S087_2015-12-20T155050Z_TGT24
sw_ver:664
start_time:"2015-12-20 15:50:50.555495"
end_time:"2015-12-21 05:26:26.571228"
duration:"13:35:36.015733"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:3498
z_ret_nm:573.67200000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.0696574349584189
set_pt:2.2671854734111543
fadj:-6.3721675440604253
ctrl_image:False
mag_phase:False
work_pt:4.081380444256638
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-120.56534090673959
y_orig_um:39.977780976000005