filename:TLM__MD_M024_S088_TARGET_EXPOSE_SCAN___COUNT_2400002.DAT scan_file:SCAN_MD_M024_S088_2015-12-23T080933Z_TGT24 sw_ver:664 start_time:"2015-12-23 08:09:33.629927" end_time:"2015-12-23 23:43:16.647938" duration:"15:33:43.018011" channel:ZS tip_num:5 lin_pos:3.1223010605020218 tip_offset:-14.723144121461743 wheel_pos:384 target:24 target_type:SOLGEL x_orig:33972 y_orig:3984 xsteps:224 x_step:94 x_step_nm:358.50095999999996 xlen_um:80.304215040000003 ysteps:224 y_step:257 y_step_nm:356.94447300000002 ylen_um:79.955561952000011 z_step:4.0 z_ret:3935 z_ret_nm:645.34000000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:3 ac_gain:4 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.3653772793163963 set_pt:2.3413443198290991 fadj:-6.3477531090257111 ctrl_image:False mag_phase:False work_pt:4.214455502316622 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:100 z_settle:100 x_orig_um:-54.875251641461738 y_orig_um:39.977780976000005