filename:TLM__MD_M024_S088_TARGET_EXPOSE_SCAN___COUNT_2400002.DAT
scan_file:SCAN_MD_M024_S088_2015-12-24T043714Z_TGT24
sw_ver:664
start_time:"2015-12-24 04:37:14.653609"
end_time:"2015-12-24 19:28:46.670806"
duration:"14:51:32.017197"
channel:ZS
tip_num:5
lin_pos:3.048142214084077
tip_offset:-144.50112535286513
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:3935
z_ret_nm:645.34000000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.2240787365529862
set_pt:2.3059433890287631
fadj:-6.4026855878538189
ctrl_image:False
mag_phase:False
work_pt:4.150870619053698
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-184.65323287286512
y_orig_um:39.977780976000005