filename:TLM__MD_M024_S088_TARGET_EXPOSE_SCAN___COUNT_2400002.DAT
scan_file:SCAN_MD_M024_S088_2015-12-26T080114Z_TGT24
sw_ver:664
start_time:"2015-12-26 08:01:14.713097"
end_time:"2015-12-26 22:53:54.730316"
duration:"14:52:40.017219"
channel:ZS
tip_num:5
lin_pos:3.0118257419699397
tip_offset:-208.05495155260547
wheel_pos:384
target:24
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:3935
z_ret_nm:645.34000000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:3
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.6699473563744558
set_pt:2.417334248874647
fadj:-6.2287327382314794
ctrl_image:False
mag_phase:False
work_pt:4.351513198853118
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-248.20705907260546
y_orig_um:39.977780976000005