filename:TLM__MD_M024_S088_TARGET_EXPOSE_SCAN___COUNT_2400002.DAT scan_file:SCAN_MD_M024_S088_2015-12-28T235421Z_TGT24 sw_ver:664 start_time:"2015-12-28 23:54:21.787035" end_time:"2015-12-29 16:35:45.806352" duration:"16:41:24.019317" channel:ZS tip_num:5 lin_pos:3.048142214084077 tip_offset:-144.50112535286513 wheel_pos:384 target:24 target_type:SOLGEL x_orig:39220 y_orig:18336 xsteps:352 x_step:30 x_step_nm:114.4152 xlen_um:40.274150399999996 ysteps:352 y_step:82 y_step_nm:113.888898 ylen_um:40.088892095999995 z_step:4.0 z_ret:1256 z_ret_nm:205.98400000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:3 ac_gain:4 x_closed:False y_closed:True aborted:False dummy:False res_amp:9.4209201190203711 set_pt:2.3550774395361258 fadj:-6.3260852979324023 ctrl_image:False mag_phase:False work_pt:4.239449992065763 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:100 z_settle:100 x_orig_um:-164.6382005528651 y_orig_um:20.044446048000001