filename:TLM__MD_M024_S089_TARGET_EXPOSE_SCAN___COUNT_2400003.DAT
scan_file:SCAN_MD_M024_S089_2015-12-30T234545Z_TGT01
sw_ver:664
start_time:"2015-12-30 23:45:45.842423"
end_time:"2015-12-31 04:33:18.847970"
duration:"4:47:33.005547"
channel:ZS
tip_num:14
lin_pos:-4.7067978942549784
tip_offset:235.3536850537885
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4.0
z_ret:19069
z_ret_nm:3127.3160000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1879148546578167
set_pt:5.7502098115510796
fadj:6.1097123674372469
ctrl_image:False
mag_phase:False
work_pt:6.4690685289169565
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:195.32362041378849
y_orig_um:40.000003200000002