filename:TLM__MD_M024_S089_TARGET_EXPOSE_SCAN___COUNT_2400003.DAT
scan_file:SCAN_MD_M024_S089_2016-01-04T011915Z_TGT10
sw_ver:664
start_time:"2016-01-04 01:19:15.955333"
end_time:"2016-01-04 13:53:32.969883"
duration:"12:34:17.014550"
channel:ZS
tip_num:14
lin_pos:-5.371480888075074
tip_offset:-927.84155413137864
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2217898832684826
set_pt:3.6108949416342413
fadj:6.1383993286030369
ctrl_image:False
mag_phase:False
work_pt:6.4995557962166535
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-967.87161877137862
y_orig_um:-144.08000152870204