filename:TLM__MD_M024_S089_TARGET_EXPOSE_SCAN___COUNT_2400003.DAT
scan_file:SCAN_MD_M024_S089_2016-01-04T154811Z_TGT10
sw_ver:664
start_time:"2016-01-04 15:48:11.972095"
end_time:"2016-01-05 04:09:31.986394"
duration:"12:21:20.014299"
channel:ZS
tip_num:14
lin_pos:-4.9060807202258339
tip_offset:-113.3912603952085
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1937132829785613
set_pt:3.5968566414892806
fadj:6.1145952544441897
ctrl_image:False
mag_phase:False
work_pt:6.474287070166453
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-153.4213250352085
y_orig_um:-144.08000152870204