filename:TLM__MD_M024_S089_TARGET_EXPOSE_SCAN___COUNT_2400003.DAT scan_file:SCAN_MD_M024_S089_2016-01-05T060554Z_TGT10 sw_ver:664 start_time:"2016-01-05 06:05:54.988639" end_time:"2016-01-05 18:28:31.002964" duration:"12:22:36.014325" channel:ZS tip_num:14 lin_pos:-4.7598992904554818 tip_offset:142.42624170290762 wheel_pos:159 target:10 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:128 x_step:164 x_step_nm:625.46975999999995 xlen_um:80.060129279999998 ysteps:128 y_step:450 y_step_nm:625.00004999999999 ylen_um:80.000006400000004 z_step:4.0 z_ret:11442 z_ret_nm:1876.4880000000001 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:CON exc_lvl:2 ac_gain:2 x_closed:False y_closed:True aborted:True dummy:False res_amp:7.1720454718852524 set_pt:3.5858701457236593 fadj:6.0959792477302202 ctrl_image:False mag_phase:False work_pt:6.454786205497278 set_pt_per:50.000762951094835 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:102.39617706290761 y_orig_um:-144.08000152870204