filename:TLM__MD_M025_S092_TARGET_EXPOSE_SCAN___COUNT_2500002.DAT
scan_file:SCAN_MD_M025_S092_2016-01-21T043513Z_TGT10
sw_ver:664
start_time:"2016-01-21 04:35:13.436573"
end_time:"2016-01-21 14:04:02.447858"
duration:"9:28:49.011285"
channel:ZS
tip_num:14
lin_pos:-4.7235828183413444
tip_offset:205.98006790264799
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:450
y_step_nm:625.00004999999999
ylen_um:80.000006400000004
z_step:8.0
z_ret:11442
z_ret_nm:1876.4880000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.1467154955367365
set_pt:3.5733577477683682
fadj:6.0746166170748452
ctrl_image:True
mag_phase:False
work_pt:6.431989420038946
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:165.95000326264798
y_orig_um:224.08000792870206