filename:TLM__MD_M025_S092_TARGET_EXPOSE_SCAN___COUNT_2500002.DAT
scan_file:SCAN_MD_M025_S092_2016-01-21T151953Z_TGT13
sw_ver:664
start_time:"2016-01-21 15:19:53.449362"
end_time:"2016-01-22 12:30:24.474568"
duration:"21:10:31.025206"
channel:ZS
tip_num:11
lin_pos:-2.2030975814450295
tip_offset:4.8292324711980372
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:42452
y_orig:27136
xsteps:512
x_step:8
x_step_nm:30.510719999999999
xlen_um:15.621488639999999
ysteps:512
y_step:22
y_step_nm:30.555558000000001
ylen_um:15.644445696
z_step:4.0
z_ret:373
z_ret_nm:61.172000000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:True
dummy:False
res_amp:9.3559166857404445
set_pt:2.3389028763256277
fadj:3.8358129243915466
ctrl_image:False
mag_phase:False
work_pt:4.210198199117594
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-2.9815118488019623
y_orig_um:7.8222228480000009