filename:TLM__MD_M025_S093_TARGET_EXPOSE_SCAN___COUNT_2500003.DAT
scan_file:SCAN_MD_M025_S093_2016-01-27T074505Z_TGT10
sw_ver:664
start_time:"2016-01-27 07:45:05.611749"
end_time:"2016-01-28 02:23:05.627180"
duration:"18:38:00.015431"
channel:ZS
tip_num:11
lin_pos:-2.0651560234988939
tip_offset:246.22695887693533
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:39446
y_orig:0
xsteps:416
x_step:14
x_step_nm:53.39376
xlen_um:22.21180416
ysteps:448
y_step:38
y_step_nm:52.777782000000002
ylen_um:23.644446336000001
z_step:4.0
z_ret:1140
z_ret_nm:186.96000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.5790798809796289
set_pt:5.2631418326085297
fadj:5.5921263447013043
ctrl_image:False
mag_phase:False
work_pt:5.921121697719684
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:226.95181151693532
y_orig_um:45.511114752000005