filename:TLM__MD_M025_S093_TARGET_EXPOSE_SCAN___COUNT_2500003.DAT
scan_file:SCAN_MD_M025_S093_2016-01-28T083534Z_TGT10
sw_ver:664
start_time:"2016-01-28 08:35:34.634351"
end_time:"2016-01-29 05:48:49.658864"
duration:"21:13:15.024513"
channel:ZS
tip_num:11
lin_pos:-2.0654612039368279
tip_offset:245.69289311055095
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34000
y_orig:0
xsteps:224
x_step:47
x_step_nm:179.25047999999998
xlen_um:40.152107520000001
ysteps:224
y_step:129
y_step_nm:179.16668100000001
ylen_um:40.133336544000002
z_step:4.0
z_ret:3825
z_ret_nm:627.30000000000007
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:9.0418860151064315
set_pt:4.5209430075532158
fadj:7.68535896849012
ctrl_image:True
mag_phase:False
work_pt:8.137628428427442
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:205.64757311055095
y_orig_um:45.511114752000005