filename:TLM__MD_M025_S093_TARGET_EXPOSE_SCAN___COUNT_2500003.DAT scan_file:SCAN_MD_M025_S093_2016-01-30T075642Z_TGT10 sw_ver:664 start_time:"2016-01-30 07:56:42.689049" end_time:"2016-01-30 22:29:45.705857" duration:"14:33:03.016808" channel:ZS tip_num:11 lin_pos:-2.0654612039368279 tip_offset:245.69289311055095 wheel_pos:160 target:10 target_type:SOLGEL x_orig:34000 y_orig:0 xsteps:224 x_step:47 x_step_nm:179.25047999999998 xlen_um:40.152107520000001 ysteps:224 y_step:129 y_step_nm:179.16668100000001 ylen_um:40.133336544000002 z_step:4.0 z_ret:3825 z_ret_nm:627.30000000000007 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:2 ac_gain:2 x_closed:False y_closed:True aborted:False dummy:False res_amp:8.1062027924010067 set_pt:2.0263981078812847 fadj:3.3234149691004808 ctrl_image:False mag_phase:False work_pt:3.647822179761931 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:100 z_settle:100 x_orig_um:205.64757311055095 y_orig_um:45.511114752000005